发明名称 |
Substrate having buried structure, display device including the substrate, method of making the substrate and method for fabricating the display device |
摘要 |
A method of making a substrate having a buried structure includes the steps of preparing a glass substrate having a principal surface, forming a groove on the principal surface of the glass substrate by a wet etching process, and depositing a first material over the principal surface of the glass substrate and filling the groove with the first material to form the buried structure having a surface that is substantially flush with the principal surface. The step of forming the groove includes the step of performing the wet etching process by using an etchant that includes hydrofluoric acid, ammonium fluoride, and hydrochloric acid or oxalic acid.
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申请公布号 |
US2003038903(A1) |
申请公布日期 |
2003.02.27 |
申请号 |
US20020227121 |
申请日期 |
2002.08.23 |
申请人 |
KOBAYASHI KAZUKI;FUJINO KIMIAKI;SAKONO IKUO;OHMI TADAHIRO;SUGAWA SHIGETOSHI;MORIMOTO AKIHIRO |
发明人 |
KOBAYASHI KAZUKI;FUJINO KIMIAKI;SAKONO IKUO;OHMI TADAHIRO;SUGAWA SHIGETOSHI;MORIMOTO AKIHIRO |
分类号 |
G02F1/1333;C03C15/00;G02F1/13;G02F1/1335;G02F1/1343;G02F1/1362;G02F1/1368;G09F9/30;H01L21/336;H01L21/768;H01L23/522;H01L29/417;H01L29/786;(IPC1-7):H01L29/06 |
主分类号 |
G02F1/1333 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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