| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a three-dimensional shape restoring method capable of restoring the internally present three-dimensional shape such as an interface of a semiconductor device, clarifying the shape of the interface by reducing the influence of projection errors, avoiding partial losses of the restored shape caused by system errors, and reducing partial losses caused by incidental errors. SOLUTION: This three-dimensional shape restoring method comprises a two-dimensional image inputting step of acquiring the two-dimensional image of an object having a three-dimensional shape from a plurality of different measuring directions, a contour setting step (B) of specifying the contour of the object on the plurality of two-dimensional images, a contour expanding step (C) of expanding a plurality of contours based on the system errors to form the expanded contour, an inverted projecting step (D) of performing the inverted projection of the plurality of expanded contours in the measuring directions to form a plurality of closed spaces surrounded by the expanded contours, and a set operating step (E) of obtaining an overlapping part of the plurality of closed spaces as the three-dimensional shape.</p> |
