发明名称 |
Electrostatically focused addressable field emission array chips (AFEA's) for high-speed massively parallel maskless digital e-beam direct write lithography and scanning electron microscopy |
摘要 |
Systems and methods are described for addressable field emission array (AFEA) chips. A method of operating an addressable field-emission array, includes: generating a plurality of electron beams from a pluralitly of emitters that compose the addressable field-emission array; and focusing at least one of the plurality of electron beams with an on-chip electrostatic focusing stack. The systems and methods provide advantages including the avoidance of space-charge blow-up.
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申请公布号 |
US2003038244(A1) |
申请公布日期 |
2003.02.27 |
申请号 |
US20020260321 |
申请日期 |
2002.09.30 |
申请人 |
THOMAS CLARENCE E.;BAYLOR LARRY R.;VOELKL EDGAR;SIMPSON MICHAEL L.;PAULUS MICHAEL J.;LOWNDES DOUGLAS;WHEALTON JOHN H.;WHITSON JOHN C.;WILGEN JOHN B. |
发明人 |
THOMAS CLARENCE E.;BAYLOR LARRY R.;VOELKL EDGAR;SIMPSON MICHAEL L.;PAULUS MICHAEL J.;LOWNDES DOUGLAS;WHEALTON JOHN H.;WHITSON JOHN C.;WILGEN JOHN B. |
分类号 |
G01Q30/02;G01Q70/06;G03F7/20;H01J1/304;H01J3/02;H01J37/073;H01J37/28;H01J37/305;H01J37/317;H01L21/027;(IPC1-7):H01J37/317 |
主分类号 |
G01Q30/02 |
代理机构 |
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地址 |
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