| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a polishing machine which can prevent abrasives from drying and hardening at a discharge port of a slurry discharge pipe. <P>SOLUTION: The polishing machine has a slurry discharge means 5 for discharging slurry containing abrasives from the discharge port 26a. The slurry discharge means 5 includes: a slurry supply means 21 for supplying slurry containing abrasives; a slurry supply pipe 23 through which slurry circulates; a water supply means 22 for supplying water; a water supply pipe 24 through which water supplied from the water supply means 22 circulates, and joining to the slurry supply pipe 23; and a slurry discharge pipe 26 for connecting a joining part 25 of the slurry supply pipe 23 and the water supply pipe 24 with the discharge port 26a. The slurry discharge means 5 provides an exposure prevention mechanism 29 for preventing the abrasives from exposing from the discharge port 26a when the supply of slurry stops. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
