| 发明名称 |
PLASMA TREATMENT APPARATUS |
| 摘要 |
PROBLEM TO BE SOLVED: To provide a plasma-treatment apparatus having a sufficient sealing property at a low-cost with a long life. SOLUTION: A multiple O-rings 3, 4 composed of different materials are arranged for vacuum sealing the plasma-treatment apparatus. |
| 申请公布号 |
JP2003068713(A) |
申请公布日期 |
2003.03.07 |
| 申请号 |
JP20010254296 |
申请日期 |
2001.08.24 |
| 申请人 |
MATSUSHITA ELECTRIC IND CO LTD |
发明人 |
WATANABE TOSHIYUKI;MORI SATOSHI |
| 分类号 |
H05H1/46;B01J3/00;B01J19/08;H01L21/302;H01L21/3065 |
主分类号 |
H05H1/46 |
| 代理机构 |
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| 主权项 |
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| 地址 |
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