发明名称 Device i.e. line scanner, for monitoring measuring points on object surface to be measured, has focus plane displaceable parallel to object surface, where object surface is displaceable lateral to focus plane
摘要 <p>The device has an optical sensor (5) with light sensitive elements arranged in a row, where measuring points (9, 10) lie on a focus plane (7) of the light sensitive elements. The focus plane encloses an angle greater than zero degree with an object surface to be measured. The focus plane is displaceable parallel to the object surface and/or the object surface is displaceable lateral to the focus plane. The plane is tilted by inclination of an optical axis of the device. Additional blinds are provided for producing confocal effects. An independent claim is also included for a method for simultaneous monitoring of measuring points on an object surface to be measured.</p>
申请公布号 DE102008031412(A1) 申请公布日期 2010.01.28
申请号 DE20081031412 申请日期 2008.07.02
申请人 NANOFOCUS AG 发明人 CHANBEI, SIRICHANOK;VALENTIN, JUERGEN;WEBER, MARK;WIORA, GEORG
分类号 G01B11/02 主分类号 G01B11/02
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