| 摘要 |
PROBLEM TO BE SOLVED: To improve machining accuracy of a scribe line.SOLUTION: A scribe method includes a step (a) and a step (b). In the step (a), a first scribe line is formed on an upper surface of a substrate W by a first cutter 1. The first cutter 1 is arranged on an upper surface side of the substrate W in the step (a), and a load is applied thereon in a direction toward the substrate W. In the step (b), a second scribe line is formed on a lower surface of the substrate W by a second cutter 2. The second cutter 2 is arranged on a lower surface side of the substrate W in the step (b), and is fixed in the direction toward the substrate W.SELECTED DRAWING: Figure 1 |
