| 摘要 |
PROBLEM TO BE SOLVED: To provide an adhesive for a pellicle capable of easily and accurately evaluating irregularity and undulation of adhesive with which a pellicle frame is coated, a pellicle using the same and an evaluation method of the pellicle.SOLUTION: An adhesive for a pellicle for pasting a pellicle to a photomask has a release layer (separator) 14 for protecting an adhesive layer 13 peelably pasted on an under end surface of the adhesive layer 13. The adhesive layer 13 is composed of an adhesive containing a stress luminescent material. If the uneven coated thickness of the adhesive leads in part to a convex prominent part when a pellicle frame is pasted to the photomask with the adhesive layer 13, a stress relatively stronger than that of a planner part is applied to the convex prominent part so that the stress luminescent material added to the adhesive 13 emits light strongly.SELECTED DRAWING: Figure 1 |
