| 摘要 |
PROBLEM TO BE SOLVED: To provide tweezers for a wafer that can hold and carry the wafer whose backside is wet without disturbing films formed on a front side of the wafer.SOLUTION: The tweezers for a wafer comprise a plurality of gripping pieces for gripping an outer peripheral part of the wafer and an operating part for operating intervals between the plurality of gripping pieces. The gripping pieces comprise gripping parts which are connected to the operating part and contacted with the outer peripheral part of the wafer, and opposing parts which are provided at tips of the gripping parts and oppose to a first surface of the wafer through a gap when the gripping parts are contacted with the outer peripheral part of the wafer. At least contacted parts, which are contacted with the outer peripheral part of the wafer, of the gripping parts are hydrophobic. Sides, opposing to the first surface of the wafer, of the opposing parts are hydrophobic surfaces.SELECTED DRAWING: Figure 1 |
