METHODS AND DEVICES FOR DETECTING SURFACE CONTAMINATION BY PARTICLES IN FREE AIR
摘要
Disclosed are methods and devices for detecting surface contamination by particles in free air. According to one aspect, the present description relates to a device for detecting surface contamination by particles moving in free air. Said device comprises a stationary collection surface (10) for receiving particles on one of the faces (11) thereof, and an optical head (30) which is arranged on the side of the collection surface that is opposite the face (11) for receiving the particles. The optical head comprises an optical imaging system (38) for forming an image of an elementary analysis surface (13i) of the collection surface (10) on a detection surface (33), and a lighting source (34, 35) for emitting at least one lighting beam which is suitable for covering said elementary analysis surface (13i). Means (40) for moving the optical head (30) allow the collection surface (10) to be scanned bidirectionally.
申请公布号
WO2016120276(A1)
申请公布日期
2016.08.04
申请号
WO2016EP51584
申请日期
2016.01.26
申请人
AIX-MARSEILLE UNIVERSITE (AMU);CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (CNRS)