LEVEL ADJUSTING APPARATUS OF SUBSTRATE PROCESSING APPARATUS AND LEVEL ADJUSTING METHOD USING THE SAME

摘要

The present invention relates to a level adjusting device of a substrate processing device and a level adjusting method using the same. According to the present invention, a level adjusting device of a substrate processing device for adjusting a level of a support plate connected to a susceptor which provided in a lower part of a chamber and where a substrate is placed thereon comprises: a first adjustment unit moving the support plate to a predetermined distance vertically; and a second adjustment unit preventing movement of the support plate heading upwards due to sound pressure of the inside of the chamber.