发明名称 |
Precision and apertures for lithographic systems |
摘要 |
Aperture members are provided wherein there is thin 1-10 micrometer thick crystaline membrane that is surrounded by a frame of a bulk type crystalline material. The aperture being an opening through the membrane in a typical shape useful for device fabrication, such as a circle or pattern. The aperture member of the invention can be fabricated out of a typical silicon crystalline wafer in a process where doping in a region serves as an etch stop.
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申请公布号 |
US2003049569(A1) |
申请公布日期 |
2003.03.13 |
申请号 |
US20010940415 |
申请日期 |
2001.08.28 |
申请人 |
CORDES STEVEN ALAN;CORDES MICHAEL JAMES;SPEIDELL JAMES LOUIS;MANSFIELD SCOTT |
发明人 |
CORDES STEVEN ALAN;CORDES MICHAEL JAMES;SPEIDELL JAMES LOUIS;MANSFIELD SCOTT |
分类号 |
G03F1/16;G03F7/20;(IPC1-7):G02F7/00 |
主分类号 |
G03F1/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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