Substrate injection clamp,申请号US19890381871-传众专利搜索

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发明名称	Substrate injection clamp
摘要
申请公布号	US4965466(A)	申请公布日期	1990.10.23
申请号	US19890381871	申请日期	1989.07.19
申请人	MOTOROLA, INC.	发明人	PIGOTT, JOHN M.
分类号	H01L29/73;G05F3/20;H01L21/331;H01L27/06;H03K17/082	主分类号	H01L29/73
代理机构		代理人
主权项
地址

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