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发明名称
SEMICONDUCTOR SUBSTRATE AND DEVICE
摘要
申请公布号
JPH02260428(A)
申请公布日期
1990.10.23
申请号
JP19890078230
申请日期
1989.03.31
申请人
HITACHI LTD
发明人
HORIUCHI KATSUTADA;AOKI SHIGERU
分类号
H01L21/322;H01L21/02;H01L27/12
主分类号
H01L21/322
代理机构
代理人
主权项
地址
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