发明名称 SEMICONDUCTOR DEVICE AND PRODUCTION METHOD
摘要 PURPOSE:To prevent the degradation of high frequency characteristics by setting a collector electrode on the surface of a semiconductor device, selectively setting an emitter region on the lower surface of the base region, and setting an emitter electrode which is electrically connected to the emitter region on the rear surface of the semiconductor device. CONSTITUTION:On top of a collector region 3, a collector region electrode substrate metal 6c is formed, and then a collector electrode 7c is formed on top of this. Furthermore, an oxide film 9 and a base region electrode substrate metal 6b are stacked in order on the part of a base region 2 where the collector region 3 is not formed on top, and then, a base electrode 7b is formed on top of this. Also, on the rear surface of an N diffusion layer 5 to which an emitter layer 4 is connected, and on the rear surface of an epitaxial layer 1, an emitter electrode substrate metal 6e is commonly formed, and an emitter electrode 7e is formed on top of this. As a result, the emitter electrode 7e can be easily grounded.
申请公布号 JPH04261026(A) 申请公布日期 1992.09.17
申请号 JP19910000357 申请日期 1991.01.08
申请人 MITSUBISHI ELECTRIC CORP 发明人 TANIGUCHI AKIHISA
分类号 H01L29/417;H01L21/331;H01L29/08;H01L29/73;H01L29/732 主分类号 H01L29/417
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