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发明名称
ETCHING DEVICE
摘要
申请公布号
JPH0598471(A)
申请公布日期
1993.04.20
申请号
JP19910285563
申请日期
1991.10.05
申请人
ULVAC JAPAN LTD
发明人
TANABE MASABUMI;MATSUDA AKIO;SUNADA TAKESHI;MAKI MASATO;FUJIMOTO HIDEKI;HAYASHI TOSHIO
分类号
B01J19/08;C23F4/00
主分类号
B01J19/08
代理机构
代理人
主权项
地址
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