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发明名称
摘要
申请公布号
JP2591800(B2)
申请公布日期
1997.03.19
申请号
JP19880201762
申请日期
1988.08.12
申请人
OKI ELECTRIC IND CO LTD
发明人
UEKI KENICHI;MYAZAKI HITOSHI
分类号
H01L21/66;H01L21/3205;H01L23/52;(IPC1-7):H01L21/66;H01L21/320
主分类号
H01L21/66
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代理人
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