发明名称
摘要 PROBLEM TO BE SOLVED: To prevent a bump from sticking to a capillary inner wall when the capillary is lifted, by arranging at least one penetrating hole on a wall surface of a tapered part whose aperture diameter is increased toward a wire leading-out part. SOLUTION: Penetrating holes 4 are used as air holes suck that a metal bump 11 is prevented from sticking to a wall surface of a tapered part 3. Otherwise, four ventilating holes positively sending air from the outside are formed concentrically along the aperture diameter of the tapered part 3, at intervals of 90 deg., and preferably, in the direction perpendicular to the wall surface of the tapered part 3. Sticking to the wall surfaced of the tapered part 3 can be prevented by increasing the number of the penetrating holes 4, but excellent result can be obtained sufficiently, by almost four in the concentric state. Effect can be obtained by one penetrating hole 4. When the penetrating holes 4 are formed in the direction perpendicular to the wall surface of the tapered part 3, air collides against the metal bump 11 perpendicularly, so that the sticking to the wall surface of the tapered part 3 can be prevented more effectively.
申请公布号 JP3391234(B2) 申请公布日期 2003.03.31
申请号 JP19970286544 申请日期 1997.10.20
申请人 发明人
分类号 H01L21/60 主分类号 H01L21/60
代理机构 代理人
主权项
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