| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate housing vessel supply device for easy maintenance. SOLUTION: A substrate housing vessel supply part 1 is arranged at one end part of a substrate processing part 2, in which plural processing units 3 are arranged surrounding a substrate carrying robot 4. The substrate housing vessel supply part 1 is provided with a moving mechanism part 10 for carrying an integrated cassette to a prescribed substrate supply position, a rotating mechanism part 30 arranged at the substrate supply position, an elevating mechanism part 50 for adjusting the vertical position of the rotating mechanism 30, and a door opening and closing mechanism part 70 for the integrated cassette. The door opening and closing mechanism part 70 is arranged at the opposite side of the substrate processing part 2 with the rotating mechanism part 30 integrated. The rotating mechanism part 30 rotates and moves the integrated cassette to the door opening and closing mechanism part 70 side, so that the door of the integrated cassette can be detached, and rotates and moves the integrated cassette, so that the opening of the integrated cassette can be moved to the substrate supply position. |
