ELECTRON EMITTING ELEMENT, ELECTRON SOURCE, IMAGE FORMING DEVICE AND MANUFACTURE THEREOF

摘要

PROBLEM TO BE SOLVED: To increase electrical heat resistance temperature of a conductive film and to improve electron emission property by using a composition containing PdO as a main component together with metal Bi or its oxide for a conductive film and forming electron emitting parts in the conductive film by foaming in a hydrogen atmosphere. SOLUTION: A material having a composition containing PdO as a main component together with metal Bi or its oxide is used for forming a conductive film 4 of a flat type surface conduction type electron emitting element. A fine particle film constituted of fine particles is preferably used as the conductive film 4 to obtain excellent electron emitting property. In consideration of step coverage on element electrodes 2, 3 and the resistance value between the element electrodes 2, 3, the film thickness is preferably controlled within a range from severalÅto several hundred nm. Electricity is applied between element electrodes 2, 3 to locally change the structure to form electron emitting parts 5 with changed structure. The content of Bi in the conductive film is preferably at 1-20 mole % in the total of metals.