| 摘要 |
PURPOSE: An apparatus for inspecting a semiconductor chip slave is provided to improve the productivity of a semiconductor device by reducing the inspecting time and inspecting cost of the semiconductor chip. CONSTITUTION: An apparatus for inspecting a semiconductor chip slave comprises a central controlling section(40) for generating a control signal for controlling an inspecting operation with respect to semiconductor chips and semiconductor modules, an address signal for allotting corresponding addresses, and a data signal which is stored in the corresponding addresses. The central controlling section receives(40) the inspecting result. A signal driving section(50) is provided to output the control signal, the address signal and the data signal inputted from the central controlling section(40). A slave inspecting section(60) is provided to inspect the semiconductor chips or semiconductor modules by receiving the signals outputted from the signal driving section(50).
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