X-ray fluorescence spectroscopy apparatus has a detector for receiving and analyzing a fluorescence beam emanating from a predetermined target location on a sample as result of excitation by a primary X-ray beam

摘要

An X-ray fluorescence analyzer device has a detector for receiving and analyzing a fluorescence beam emanating from at least one predetermined target location on a sample as result of excitation by a primary X-ray beam. The device has a wavelength dispersion detection unit comprising a sensor and a spectroscope and an energy dispersion detection unit with an energy dispersion sensor. An angle eta 1 is formed between the first fluorescence beam path (81) from the target area to the spectrometer and the sample surface, and an angle eta 2 is similarly formed between a second fluorescence beam path (82) from the target area to the energy dispersion detection unit (12) and the sample surface. The path length of the second beam (82) is shorter than the first beam path (81).