| 摘要 |
PROBLEM TO BE SOLVED: To reduce labor for adjusting the position of an aperture. SOLUTION: An image with a large range on a sample board 41 is fetched by a CCD camera 24, and a rectangle virtual frame expressing a virtual aperture formed by a virtual frame forming part 12 is superposed on the image, and an image is displayed on a display 5. An operator sets the position and the shape of the virtual frame with respect to a sample, while viewing the image. After the setting is finished, a coordinate converting calculating part 14 converts the central coordinate of the virtual frame of the picture on an x-y coordinate, and the length and the inclination of each side to values on X-Y coordinates of the sample board. The aperture and sample board load drive parts 17 and 18 control motors 19 to 23 in accordance with the converted value. As a result, the board 41 moves in the horizontal direction, an aperture holder 31 turns and an aperture board slides, and the actual aperture is set on a position set on a screen.
|
