| 摘要 |
PROBLEM TO BE SOLVED: To provide a micro-gas detector using a GC system capable of quantitatively measuring a gas component. SOLUTION: At least a substrate 10, a sharply pointed first electrode 12, a second electrode 14 providing a constant gap with respect to both of them and a third electrode 16 present at a position near to those electrodes but getting out of them are provided. The first electrode 12 enhances an electric field mainly to lower operation voltage and helps to keep self-holding discharge. The second electrode 14 is provided in order to mainly apply self-holding discharge keeping voltage and the third electrode 16 is provided for an igniter for applying a high voltage pulse for self-holding gas discharge ignition. A detection theory is based on the difference of ionizing characteristics between many gas molecules. In order to compensate stable and highly reliable detection, it is necessary to operate a detector in a self-holding gas discharge state. Ions and electrons generate a detectable current between electrodes by discharge ionization. This current change by a gas component is used as a selective and discernible signal. This micro-detector can be extremely inexpensively produced by lithographic micro-processing technique. Further, since a gas activating substance or a radioactive substance is not required, use is easy.
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