| 摘要 |
<p>A method and device of low manufacturing cost for detecting a foreign matter in a through hole with high accuracy at high speed. The device comprises a light source (12), a line sensor camera (14) (or area sensor) between which a work (10) having through holes is placed, a parallel moving mechanism (X-Y table (16)) for moving the work and the line sensor camera parallel and relatively to each other so as to detect all the light beams from the through holes by means of the line sensor camera, and image processing means (24) for receiving a detection signal from the line sensor camera and thereby creating items of binary image data corresponding to the through holes. The image processing means (24) is provided with judging means for judging whether or not any foreign matter is present in a through hole on the basis of the difference between the light-receiving areas corresponding to the respective through holes.</p> |
