发明名称 PIEZOELECTRIC ELEMENT AND ITS MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a piezoelectric element that realizes a stable ramen mode vibration by processing an LQ2T-cut crystal substrate having a crystal azimuth, which have had difficulty of processing such as punching by a chemical etching method, to have a prescribed shape with high accuracy in a short time and to provide a manufacturing method for the piezoelectric element. SOLUTION: In a crystal uncut stone 10 having a three-dimensional crystal axes 11 consisting of an X axis (electric axis), a Y axis (mechanical axis), and a Z axis (optical axis), a powder beam applies punching processing to a crystal substrate 14 cut by an XY' plane having a Y' axis by tilting the Y axis around the X axis toward the Z axis by an LQ2T cut-angle 15 within a range of 36-42 degrees to have a shape at which the ramen mode vibration is conducted.
申请公布号 JP2001313537(A) 申请公布日期 2001.11.09
申请号 JP20000130742 申请日期 2000.04.28
申请人 RIVER ELETEC KK 发明人 MIZUMOTO KATSUYA;YUKI HIROMOTO
分类号 H03H9/19;H03H3/02;(IPC1-7):H03H9/19 主分类号 H03H9/19
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