| 摘要 |
PROBLEM TO BE SOLVED: To efficiently manufacture a diaphragm unit capable of realizing the film thickness of severalμm and having a vibrating membrane to which prescribed tension is given. SOLUTION: In the case of manufacturing the diaphragm unit in which a diaphragm vibrating by external energy such as sound pressure is mounted on a mount frame, a composite membrane 4 is formed by layering a metallic film 2 and a resin film 3 on one surface of a substrate 1, then a hole 6 is opened by removing a total thickness portion from the other surface side of the substrate 1 at the prescribed portions of the substrate 1 corresponding to a free vibration region so that a part of composite membrane 4 is made into a free vibration region (surface), and the rest of the substrate 1 is used as the mount frame 1a to supports the composite membrane 4 vibratingly.
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