| 摘要 |
PROBLEM TO BE SOLVED: To provide a monosilane production process for converting a high- boiling residue derived from a reaction of hydrogen chloride with metalloid silicon, into monosilane by a method known as a direct method. SOLUTION: This process involves a conversion stage for bringing such a high-boiling residue into contact with gaseous hydrogen in the presence of an amount of an aluminum trichloride catalyst, effective in promoting conversion of the high-boiling residue into monosilane, wherein at least one portion of the required amount of the aluminum trichloride catalyst is produced in the above conversion stage using a direct method and an isolation stage of the converted monosilane, at the respective sites of these stages.
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