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发明名称
PLASMA SCRUBBER FOR ELIMINATION OF WASTE CLEANING GASES EMITTED FROM SEMICONDUCTOR INDUSTRIES
摘要
申请公布号
KR20060095594(A)
申请公布日期
2006.09.01
申请号
KR20050016333D
申请日期
2005.02.28
申请人
UHM, HAN SUP
发明人
HONG, YONG CHEOL;UHM, HAN SUP
分类号
H01L21/00;H01L21/304
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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