| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus and method for a photochemistry treatment which enable the photochemistry treatment with a high throughput by the enhanced activation efficiency of VUV light with a simple equipment set. SOLUTION: The apparatus for the photochemistry treatment comprises a vacuum ultraviolet ray generating source 1, a housing part 3 which houses the vacuum ultraviolet ray generating source 1, and an activated reaction chamber 2 having a gas introducing port 4 and a gas blowing port 5 wherein a reaction gas 7 introduced through the gas introducing port 4 is activated by a vacuum ultraviolet ray from the vacuum ultraviolet ray generating source 1, and a reaction gas 8 is blown to a substrate 9 to be treated through the gas blowing port 5. COPYRIGHT: (C)2007,JPO&INPIT
|
