| 摘要 |
PROBLEM TO BE SOLVED: To provide a recycling method of ozone-containing ultrapure water which is industrially advantageous by preventing deterioration of ion-exchange resins or reverse osmosis membranes in the ultrapure water production process in the recycling method of ozone-containing ultrapure water by which ozone-containing waste water being the waste water of washing precise electronic parts is allowed to pass through an ultraviolet ray irradiation device to remove ozone and circulated to an ultrapure water production process. SOLUTION: When circulating ozone-containing drain to the ultrapure water production process after dissolving ozone in ultrapure water obtained in the ultrapure water production process and using as washing water of the precise electronic parts, air is blown into the ozone-containing drain for primary removal of ozone; then the drain is subjected to ultraviolet ray irradiation for secondary ozone removal. The drain is treated with activated carbon or a reduction agent to remove oxides generated by ultraviolet ray irradiation, then circulated to the ultrapure water production process. COPYRIGHT: (C)2007,JPO&INPIT
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