METHOD FOR CONTROLLING ELECTRON BEAM IN MULTI-MICROCOLUMN AND MULTI-MICROCOLUMN USING THE SAME,申请号EP20050765910-传众专利搜索

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发明名称	METHOD FOR CONTROLLING ELECTRON BEAM IN MULTI-MICROCOLUMN AND MULTI-MICROCOLUMN USING THE SAME
摘要
申请公布号	EP1779403(A1)	申请公布日期	2007.05.02
申请号	EP20050765910	申请日期	2005.07.05
申请人	CEBT CO., LTD.	发明人	KIM, HO SEOB;KIM, BYENG JIN
分类号	H01J1/30	主分类号	H01J1/30
代理机构		代理人
主权项
地址

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