| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and an apparatus of polishing a tape capable of polishing a protrusion on a substrate surface precisely and efficiently. SOLUTION: In the method of polishing the tape, a height of the protrusion 22 to be polished is divided into working ranges of two or more stages, and force that a head pin presses the protrusion 22 via a polishing tape is made variable in respective working ranges. Therefore, the force of the head pin pressing the protrusion 22 is controlled to be optimum force depending on each working range, and a fluctuation in the pressing force per unit area applied to the protrusion can be reduced, whereby the protrusion can be precisely worked. COPYRIGHT: (C)2007,JPO&INPIT |
