| 摘要 |
<p>PURPOSE:To improve the yield of a lot by prolonging process processing time when a product processing within prescribed time by means of the specified device of a process is impossible or when the product processing is possible at any time within prescribed time. CONSTITUTION:A processing plan generation means 10 generates the processing condition of the lot. A process processing means 20 processes the lot by the device. A process progress management means 30 manages a processing progress situation in the device of the lot. A device state management means 40 evaluates the product processing state of the device. When the product processing within prescribed time by the specified device of the process is impossible and when the product processing is possible at any time within prescribed time, a processing time alteration means 50 increases/alters the process processing time of the specified device. Thus, the processing time of the process where the quality of the product can be expected as processing time is longer such as a cleaning process in the production line of semiconductor IC, for example, is prolonged, and the yield of the lot can be improved.</p> |
