| 摘要 |
<p>PROBLEM TO BE SOLVED: To detect the damage of diaphragm part using a small scale circuit. SOLUTION: A micromechanical sensor 1 is constituted to detect the acceleration or the like based on the variation in the resistance of a piezoelectric resistors provided on a diaphragm formed on a semiconductor substrate caused by an application signal of acceleration or the like. Variation of the output due to damage of the diaphraqm is detected by connecting an inverter circuit, comprising an MOSFET and a resistor element, directly with the output of a bridge circuit comprising the piezoelectric resistors of micromechanical sensor 1.</p> |
