Method of loading a charge of polysilicon into a crucible

摘要

A method of loading a crucible includes loading a first layer of polysilicon chunks into the crucible and loading a second layer of granular polysilicon into the crucible to form a polysilicon charge such that the packing density of the polysilicon charge within the crucible is greater than 0.70.

主权项

1. A method of loading a crucible, comprising:
loading a first layer of polysilicon chunks into the crucible; loading a second layer of granular polysilicon into the crucible; and loading a third layer of polysilicon particles into the crucible such that the following equation is satisfied:
PDC=PDL+(1−PDL)PDM+(1−PDL)(1−PDM)PDS, wherein: PDC is a packing density of a charge of polysilicon within the crucible; PDL is a packing density of the polysilicon chunks; PDM is a packing density of the polysilicon particles; and PDS is a packing density of the polysilicon granules, and wherein the packing density of polysilicon within the crucible is greater than about 0.70.