| 摘要 |
The present invention relates to a roller to transfer a substrate, which includes: first and second roller parts (100)(200) separately divided into two to be combined with a side of a transfer shaft (1); a support ring (300) of which internal edge touches the outer surface of the transfer shaft (1), and placed between the first and second roller parts (100)(200); a contact ring (400) placed between the first and second roller parts (100)(200) to touch the bottom of the substrate when the substrate is transferred; and first and second combination rings (510)(520) combining the first and second roller parts (100)(200) separately divided into two. The present invention is capable of significantly reducing time for the replacement of a roller by replacing the roller without disassembling a substrate transfer shaft, combined with the roller, thereby improving productivity by reducing suspension time for the replacement of the roller. |
