CMP CONDITIONER AND METHOD OF MANUFACTURING THE CONDITIONER

摘要

PROBLEM TO BE SOLVED: To make hard the occurrence of corrosion by slurry by increasing a corrosive resistance and a wear resistance. SOLUTION: A large number of super abrasive grains 23, etc., are fixed onto one surface 21a of a base metal 21 (grinding wheel base body) made of stainless steel through a metallic bond phase 22 made of Ni or Ni alloy to form an abrasive grain layer 24. A surface plating layer 27 formed of Au is formed by Au plating on the one surface 21a of the base metal 21 in all areas including the abrasive grain layer 24. A hard corrosion resistant plating layer 28 formed of Rh is formed on the surface plating layer 27.