| 摘要 |
PROBLEM TO BE SOLVED: To provide a support frame for pellicle in which, when removing a support frame from a transparent substrate, the deformation of the support frame can be suppressed.SOLUTION: Provided is a support frame 1 for a pellicle P in which a pellicle film 2 is adhered to a surface 10a of a frame body 10 made of aluminum alloy, and a transparent substrate M is adhered to a back surface 10b of frame body 10, and in which, in a back surface 10b of frame body 10, a recessed groove 20 extending in the frame body 10 circumferential direction, is formed, as well as a vent hole 30 leading from an outer peripheral surface 10c of frame body 10 to an inner surface of recessed groove 20, is formed.SELECTED DRAWING: Figure 2 |
