发明名称 CUTTING DEVICE
摘要 PROBLEM TO BE SOLVED: To suppress the consumption amount of cutting water when it is required to jet water from a fluid nozzle and guide an end material in a wafer case to a drainage portion in a cutting process using a cutting device.SOLUTION: In a cutting device 1, water is jetted from a fluid nozzle 8 in which water is jetted to a drainage port 75 in a water case 7 having the drainage port 75 for receiving sawdust C and an end material M and discharging water, thereby fluidizing the sawdust C and the end material M. A circulation system 9 contains a tank 90 for storing used cutting water F which contains the sawdust C and the end material M and is drained from the drainage port 75, a circulation pump 91 for supplying a pump-up fluid nozzle 8 with the used cutting water F from which at least the end material M is removed, and a water feeding pipe 92 for feeding the used cutting water F pumped up by the circulation pump 91 to the fluid nozzle 8. The used cutting water F circulated by the circulation system is used as the water jetted from the fluid nozzle 8.SELECTED DRAWING: Figure 2
申请公布号 JP2016134475(A) 申请公布日期 2016.07.25
申请号 JP20150007564 申请日期 2015.01.19
申请人 DISCO ABRASIVE SYST LTD 发明人 OMURO YOSHIHIRO
分类号 H01L21/301;B23Q11/00;B24B27/06;B24B57/02 主分类号 H01L21/301
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