CHARGED PARTICLE BEAM DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a charged particle beam device that can suppress image jitter caused by vibration of a lens barrel with a relatively simple construction.SOLUTION: A charged particle beam device comprises: a sample chamber in which a sample is disposed; a stage on which the sample is mounted; a charged particle source for irradiating a charged particle beam; a mirror barrel in which the charged particle source is mounted and which is configured by plural cylindrical mirror barrel members; an objective lens which is disposed at the lower end of the mirror barrel and focuses on the sample; and a pump for evacuating the inside of the mirror barrel. The charged particle beam device includes a joint part that is disposed between the objective lens and the mirror barrel members so as to make it easy to tilt the mirror barrel.SELECTED DRAWING: Figure 1