发明名称 Arc lamp illuminator
摘要 Arc lamp illuminator which can be used in an optical device for the transfer of patterns, incorporating a mixed fibre bundle which intercepts in an image plane of the source part of the emitted radiation. The exit cross-section of the bundle is adapted to the degree of coherence of the desired illumination measured on the pupil of the optical transfer device. At the entrance, the fibres of the bundle are assembled into two separate bundles, whose ends are aligned with the maximum intensity zone formed in the image plane of the source.
申请公布号 US4375315(A) 申请公布日期 1983.03.01
申请号 US19800142471 申请日期 1980.04.21
申请人 THOMSON-CSF 发明人 LACOMBAT, MICHEL;DUBROEUCQ, GEORGES
分类号 H01L21/027;G02B6/42;G02B19/00;G03F7/20;(IPC1-7):G02B5/17 主分类号 H01L21/027
代理机构 代理人
主权项
地址