| 摘要 |
PURPOSE:To obtain fine pattern transfer glass excellent in transfer properties in excellent yield by dispersing fine particles having a particle diameter within a specific range in a liquid sol in producing the above-mentioned glass according to a sol-gel method. CONSTITUTION:A liquid sol of the objective glass component composition is prepared by using one or more metal alkoxides as principal components. The resultant liquid sol is then gelationized while being in contact with a matrix having a desired shape or pattern to afford a wet gel, which is subsequently vitrified by heat treatment, such as drying or calcining, to provide fine pattern transfer glass. In the method for production, fine particles having an average particle diameter of 100Angstrom to (A/5) in which the minimum width or depth of the pattern on the transfer matrix is A are uniformly dispersed in the aforementioned liquid sol. The calcining maximum temperature is a temperature at which solid-phase interfacial diffusion between the particles constituting the dried gel is completed to eliminate micropores between the fine particles. |
