Heating apparatus

摘要

A heating apparatus comprising a heating chamber the inside of which is heated to a fixed temperature and which is provided with an entrance and an exit through which articles to be heated are taken in and out of the heating chamber, a support on which the articles are supported inside and outside of the heating chamber, a conveyer which moves vertically and horizontally so that the top surface of the conveyer is above and below the top surface of the conveyer is above and below the top surface of the support and that the conveyer reciprocates in the direction in which the articles are conveyed, and a pair of doors for opening and closing the entrance and exit of the heating chamber, whereby the articles are successively moved over a fixed distance by the conveyer toward the heating chamber, thereby providing a heating apparatus with a simple structure in which articles such as semiconductor devices are conveyed to the heating chamber without vibration and then properly heated in the heating chamber.