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经营范围
发明名称
SINGLE CRYSTAL PULLING UP DEVICE
摘要
申请公布号
JPH07330480(A)
申请公布日期
1995.12.19
申请号
JP19940130108
申请日期
1994.06.13
申请人
HITACHI LTD
发明人
FUJIOKA KAZUMASA;SUZUKI KAZUYA
分类号
C30B15/00;H01L21/208;(IPC1-7):C30B15/00
主分类号
C30B15/00
代理机构
代理人
主权项
地址
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