发明名称 NON-PHOTOGRAPHIC METHOD FOR PATTERNING ORGANIC POLYMER FILMS
摘要 A non-photographic method for making patterns in organic polymer films comprising the sequential steps: a. Applying to a substrate an unpatterned first layer comprising a solid organic polymer which is dispersible in a predetermined eluant; b. Applying to the unpatterned first layer a patterned second layer comprising an agent which is capable of changing the dispersibility of the solid organic polymer in the predetermined eluant; c. Effecting patterned diffusion of the dispersibility-changing agent into the underlying solid organic polymer layer; and d. Removing the areas of the underlying solid organic polymer which are dispersible in the eluant by washing them with the predetermined eluant.
申请公布号 EP0497896(B1) 申请公布日期 1997.03.19
申请号 EP19900917075 申请日期 1990.10.11
申请人 E.I. DU PONT DE NEMOURS AND COMPANY 发明人 FELTEN, JOHN, JAMES
分类号 C09D133/10;B41M1/12;B41M3/00;C09D133/04;G02F1/1343;G03F7/00;H01L21/312;H01L21/48;H05K3/00;H05K3/02;H05K3/10;H05K3/46;(IPC1-7):H01L21/70;H05K3/12 主分类号 C09D133/10
代理机构 代理人
主权项
地址