发明名称 |
NON-PHOTOGRAPHIC METHOD FOR PATTERNING ORGANIC POLYMER FILMS |
摘要 |
A non-photographic method for making patterns in organic polymer films comprising the sequential steps: a. Applying to a substrate an unpatterned first layer comprising a solid organic polymer which is dispersible in a predetermined eluant; b. Applying to the unpatterned first layer a patterned second layer comprising an agent which is capable of changing the dispersibility of the solid organic polymer in the predetermined eluant; c. Effecting patterned diffusion of the dispersibility-changing agent into the underlying solid organic polymer layer; and d. Removing the areas of the underlying solid organic polymer which are dispersible in the eluant by washing them with the predetermined eluant. |
申请公布号 |
EP0497896(B1) |
申请公布日期 |
1997.03.19 |
申请号 |
EP19900917075 |
申请日期 |
1990.10.11 |
申请人 |
E.I. DU PONT DE NEMOURS AND COMPANY |
发明人 |
FELTEN, JOHN, JAMES |
分类号 |
C09D133/10;B41M1/12;B41M3/00;C09D133/04;G02F1/1343;G03F7/00;H01L21/312;H01L21/48;H05K3/00;H05K3/02;H05K3/10;H05K3/46;(IPC1-7):H01L21/70;H05K3/12 |
主分类号 |
C09D133/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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