Verfahren zur Untersuchung einer Mehrzahl ähnlicher Prüflinge auf Lecks sowie für die Durchführung dieses Verfahrens geeigneter Lecksucher

摘要

A process is disclosed for inspecting a plurality of similar test bodies for leaks. The test bodies are first evacuated by a preliminary vacuum pump (evacuation mode), down to a pressure Pu selected to ensure that the maximum admissible pressure in the mass spectrometer (5) is not exceeded when the measurement mode is switched on, and then the evacuation mode is switched to a measurement mode by opening the second valve (16). In order to shorten evacuation times, a learning process is used to determine the optimum switching pressure Pu opt.