| 摘要 |
PROBLEM TO BE SOLVED: To shorten the time required in the visual inspection of an object to be inspected. SOLUTION: The visual inspection device 10 includes a scanning head 16 for scanning the object to obtain an image, a memory 44 for storing the obtained image, a main unit 12 for performing the inspection of the image according to a predetermined inspection item, and a file memory 58 storing a file wherein resolving power for inspecting the object at every region is described. The scanning head 16 once obtains the image with maximum resolving power and the obtained image is stored in the memory 44. The main unit 12 reads the file from the file memory part 58, and the object is inspected with resolving power designated at every region according to the description of the file. The number of times for picking up the image may be once with respect to the object.
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