INFRA-RED TRANSPARENT THERMAL REACTOR COVER MEMBER,申请号EP19990935833-传众专利搜索

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发明名称	INFRA-RED TRANSPARENT THERMAL REACTOR COVER MEMBER
摘要
申请公布号	EP1097470(B1)	申请公布日期	2006.12.20
申请号	EP19990935833	申请日期	1999.07.21
申请人	APPLIED MATERIALS, INC.	发明人	ANDERSON, ROGER N.
分类号	H01L21/00;H01L21/302;C23C16/48;H01L21/205;H01L21/26;H01L21/3065	主分类号	H01L21/00
代理机构		代理人
主权项
地址

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