发明名称 SYSTEM AND METHOD FOR VORTEX CONDENSATION TRAPPING IN PURGE GAS HUMIDIFICATION
摘要 <p>In one embodiment according to the invention, there is disclosed a purge gas humidification system. The system comprises a moisturizer configured to add moisture to a purge gas; and a condensation trap (206) comprising an inlet (207) configured to receive humidified purge gas from the moisturizer, a water drain (208) configured to drain excess condensed water from the condensation trap, and an outlet (209) configured to output humidified purge gas from the condensation trap. The condensation trap is configured to induce a substantially vortex flow pattern in the humidified purge gas received from the moisturizer.</p>
申请公布号 WO2008024263(A1) 申请公布日期 2008.02.28
申请号 WO2007US18158 申请日期 2007.08.15
申请人 ENTEGRIS, INC;ROTTER, JOSEPH, P.;FLORES, RAMEDY, G.;WELCH, MATTHEW, D. 发明人 ROTTER, JOSEPH, P.;FLORES, RAMEDY, G.;WELCH, MATTHEW, D.
分类号 G03F7/20 主分类号 G03F7/20
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